Reid G. Simmons, John Mohammed. Causal modelling of semiconductor fabrication. AI in Engineering, 4(1):2-21, 1989. [doi]
@article{SimmonsM89,
title = {Causal modelling of semiconductor fabrication},
author = {Reid G. Simmons and John Mohammed},
year = {1989},
doi = {10.1016/0954-1810(89)90021-6},
url = {http://dx.doi.org/10.1016/0954-1810(89)90021-6},
tags = {meta-model, Meta-Environment},
researchr = {https://researchr.org/publication/SimmonsM89},
cites = {0},
citedby = {0},
journal = {AI in Engineering},
volume = {4},
number = {1},
pages = {2-21},
}