A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications

Richard Smith, Douglas R. Sparks, Diane Riley, Nader Najafi. A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications. IEEE Transactions on Industrial Electronics, 56(4):1066-1071, 2009. [doi]

Authors

Richard Smith

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Douglas R. Sparks

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Diane Riley

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Nader Najafi

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