Influences of silicon-rich shallow trench isolation on total ionizing dose hardening and gate oxide integrity in a 130 nm partially depleted SOI CMOS technology

Lei Song, Zhiyuan Hu, Mengying Zhang, Xiaonian Liu, Lihua Dai, Zhengxuan Zhang, Shichang Zou. Influences of silicon-rich shallow trench isolation on total ionizing dose hardening and gate oxide integrity in a 130 nm partially depleted SOI CMOS technology. Microelectronics Reliability, 74:1-8, 2017. [doi]

Authors

Lei Song

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Zhiyuan Hu

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Mengying Zhang

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Xiaonian Liu

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Lihua Dai

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Zhengxuan Zhang

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Shichang Zou

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