W. Merlijn van Spengen. MEMS reliability from a failure mechanisms perspective. Microelectronics Reliability, 43(7):1049-1060, 2003. [doi]
@article{Spengen03,
title = {MEMS reliability from a failure mechanisms perspective},
author = {W. Merlijn van Spengen},
year = {2003},
doi = {10.1016/S0026-2714(03)00119-7},
url = {http://dx.doi.org/10.1016/S0026-2714(03)00119-7},
researchr = {https://researchr.org/publication/Spengen03},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {43},
number = {7},
pages = {1049-1060},
}