Neural Net Based Prognostics for an Industrial Semiconductor Fabrication System - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Victor M. Stone, Mehrdad Jamshidi. Neural Net Based Prognostics for an Industrial Semiconductor Fabrication System. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Waikoloa, Hawaii, USA, October 10-12, 2005. pages 1512-1517, IEEE, 2005. [doi]

This author has not been identified. Look up 'Victor M. Stone' in GoogleThis author has not been identified. Look up 'Mehrdad Jamshidi' in Google

runs on WebDSL