Makoto Sugihara, Taiga Takata, Kenta Nakamura, Ryoichi Inanami, Hiroaki Hayashi, Katsumi Kishimoto, Tetsuya Hasebe, Yukihiro Kawano, Yusuke Matsunaga, Kazuaki Murakami, Katsuya Okumura. A character size optimization technique for throughput enhancement of character projection lithography. In International Symposium on Circuits and Systems (ISCAS 2006), 21-24 May 2006, Island of Kos, Greece. IEEE, 2006. [doi]
@inproceedings{SugiharaTNIHKHKMMO06,
title = {A character size optimization technique for throughput enhancement of character projection lithography},
author = {Makoto Sugihara and Taiga Takata and Kenta Nakamura and Ryoichi Inanami and Hiroaki Hayashi and Katsumi Kishimoto and Tetsuya Hasebe and Yukihiro Kawano and Yusuke Matsunaga and Kazuaki Murakami and Katsuya Okumura},
year = {2006},
doi = {10.1109/ISCAS.2006.1693146},
url = {http://dx.doi.org/10.1109/ISCAS.2006.1693146},
tags = {optimization},
researchr = {https://researchr.org/publication/SugiharaTNIHKHKMMO06},
cites = {0},
citedby = {0},
booktitle = {International Symposium on Circuits and Systems (ISCAS 2006), 21-24 May 2006, Island of Kos, Greece},
publisher = {IEEE},
}