Fabrication of Titanium-Based Hard Coatings by Atmospheric Microplasma-Metal Organic Chemical Vapor Deposition Using Titanium Tetraisopropoxide

Tsunehisa Suzuki, Mutsuto Kato, Yoshiki Shimizu. Fabrication of Titanium-Based Hard Coatings by Atmospheric Microplasma-Metal Organic Chemical Vapor Deposition Using Titanium Tetraisopropoxide. IJAT, 7(6):720-725, 2013. [doi]

Authors

Tsunehisa Suzuki

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Mutsuto Kato

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Yoshiki Shimizu

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