Tool capacity planning for semiconductor fabrication facilities under demand uncertainty

Jayashankar M. Swaminathan. Tool capacity planning for semiconductor fabrication facilities under demand uncertainty. European Journal of Operational Research, 120(3):545-558, 2000. [doi]

@article{Swaminathan00,
  title = {Tool capacity planning for semiconductor fabrication facilities under demand uncertainty},
  author = {Jayashankar M. Swaminathan},
  year = {2000},
  doi = {10.1016/S0377-2217(98)00389-0},
  url = {http://dx.doi.org/10.1016/S0377-2217(98)00389-0},
  researchr = {https://researchr.org/publication/Swaminathan00},
  cites = {0},
  citedby = {0},
  journal = {European Journal of Operational Research},
  volume = {120},
  number = {3},
  pages = {545-558},
}