Interactive nano manipulator based on an atomic force microscope for scanning electron microscopy

Masaki Takahashi, Hideyuki Ko, Tatsuo Ushiki, Futoshi Iwata. Interactive nano manipulator based on an atomic force microscope for scanning electron microscopy. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 495-500, IEEE, 2011. [doi]

Authors

Masaki Takahashi

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Hideyuki Ko

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Tatsuo Ushiki

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Futoshi Iwata

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