Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels

Tomokazu Takahashi, Masato Suzuki, Shota Iwamoto, Seiji Aoyagi. Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels. Micromachines, 3(2):270-278, 2012. [doi]

Authors

Tomokazu Takahashi

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Masato Suzuki

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Shota Iwamoto

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Seiji Aoyagi

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