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Fabrication of InP/InGaAs DHBTs with Buried SiO::2:: Wires

Naoaki Takebe, Takashi Kobayashi, Hiroyuki Suzuki, Yasuyuki Miyamoto, Kazuhito Furuya. Fabrication of InP/InGaAs DHBTs with Buried SiO::2:: Wires. IEICE Transactions, 94-C(5):830-834, 2011. [doi]

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