A New Lateral Rf Switch Using Soi-Deep-Etching Fabrication Process

M. Tang, Ajay Agarwal, P. Win, Q. X. Zhang, J. Li, A. Q. Liu. A New Lateral Rf Switch Using Soi-Deep-Etching Fabrication Process. International Journal of Computational Engineering Science, 4(2):369-372, 2003. [doi]

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