Charge-based femto-farad capacitance measurement technique for MEMS applications - researchr publication authors

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A. Tanskanen, B. Bahreyni, M. Syrzycki. Charge-based femto-farad capacitance measurement technique for MEMS applications. In 2016 IEEE Canadian Conference on Electrical and Computer Engineering, CCECE 2016, Vancouver, BC, Canada, May 15-18, 2016. pages 1-4, IEEE, 2016. [doi]

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