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Dual-Level Capacitive Micromachined Uncooled Thermal Detector

Hani H. Tawfik, Karim Allidina, Frederic Nabki, Mourad N. El-Gamal. Dual-Level Capacitive Micromachined Uncooled Thermal Detector. Sensors, 19(24):5434, 2019. [doi]

Authors

Hani H. Tawfik

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Karim Allidina

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Frederic Nabki

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Mourad N. El-Gamal

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