A MEMS-based flow sensor with membrane cantilever beam array structure - researchr publication authors

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Bian Tian, Huafeng Li, Ning Yang, Hanyue Liu, Yulong Zhao. A MEMS-based flow sensor with membrane cantilever beam array structure. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 185-189, IEEE, 2017. [doi]

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