Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

Alessio Tommasi, Matteo Cocuzza, Denis Perrone, Candido F. Pirri, Roberto Mosca, Marco Villani, Nicola Delmonte, Andrea Zappettini, Davide Calestani, Simone L. Marasso. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications. Sensors, 17(1):62, 2017. [doi]

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