Robust control of nonlinear MEMS optical switch based on quantitative feedback theory

Z. K. Torabi, M. Vali, B. Ebrahimi, M. Bahrami. Robust control of nonlinear MEMS optical switch based on quantitative feedback theory. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 122-128, IEEE, 2010. [doi]

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