Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials

Carlo Trigona, Bruno Ando, Salvatore Baglio. Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials. IEEE T. Instrumentation and Measurement, 63(3):702-710, 2014. [doi]

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