An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method

Hsiu-An Tsai, Yu-lung Lo. An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method. Sensors, 19(12):2816, 2019. [doi]

@article{TsaiL19-2,
  title = {An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method},
  author = {Hsiu-An Tsai and Yu-lung Lo},
  year = {2019},
  doi = {10.3390/s19122816},
  url = {https://doi.org/10.3390/s19122816},
  researchr = {https://researchr.org/publication/TsaiL19-2},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {19},
  number = {12},
  pages = {2816},
}