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Optimization of AMHS design for a semiconductor foundry fab by using simulation modeling

Jacky Tung, Tina Sheen, Merlin Kao, C.-H. Chen. Optimization of AMHS design for a semiconductor foundry fab by using simulation modeling. In Winter Simulations Conference: Simulation Making Decisions in a Complex World, WSC 2013, Washington, DC, USA, December 8-11, 2013. pages 3829-3839, IEEE, 2013. [doi]

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Jacky Tung

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Tina Sheen

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Merlin Kao

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C.-H. Chen

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