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Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher

Michio Uneda, Keiichi Takano, Koji Koyama, Hideo Aida, Ken ichi Ishikawa. Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher. IJAT, 9(5):573-579, 2015. [doi]

Authors

Michio Uneda

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Keiichi Takano

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Koji Koyama

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Hideo Aida

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Ken ichi Ishikawa

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