A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects - researchr publication authors

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Marialena Vagia, Anthony Tzes. A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects. In American Control Conference, ACC 2010, Baltimore, Maryland, USA, June 30 - July 2, 2010. pages 3390-3402, IEEE, 2010. [doi]

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