A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

Manjunath R. Venkatesh, Sumit Sachdeva, Brahim El Mansouri, Jia Wei, Andre Bossche, Duco Bosma, Louis C. P. M. de Smet, Ernst J. R. Sudhölter, Guo-Qi Zhang. A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer. Sensors, 19(4):888, 2019. [doi]

Authors

Manjunath R. Venkatesh

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Sumit Sachdeva

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Brahim El Mansouri

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Jia Wei

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Andre Bossche

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Duco Bosma

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Louis C. P. M. de Smet

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Ernst J. R. Sudhölter

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Guo-Qi Zhang

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