Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage - researchr publication authors

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Robbert Voorhoeve, Robin de Rozario, Wouter H. T. M. Aangenent, Tom Oomen. Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage. IEEE Trans. Contr. Sys. Techn., 29(1):194-206, 2021. [doi]

This author has not been identified. Look up 'Robbert Voorhoeve' in GoogleThis author has not been identified. Look up 'Robin de Rozario' in GoogleThis author has not been identified. Look up 'Wouter H. T. M. Aangenent' in GoogleThis author has not been identified. Look up 'Tom Oomen' in Google

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