Experimental Demonstration of Noncontact Nanometer Displacement Sensing by Optical Digital Coherent Detection

Xiaoyan Wang, Mitsuki Kondo, Masanori Hanawa. Experimental Demonstration of Noncontact Nanometer Displacement Sensing by Optical Digital Coherent Detection. In 2022 27th OptoElectronics and Communications Conference (OECC) and 2022 International Conference on Photonics in Switching and Computing (PSC), Toyama, Japan, July 3-6, 2022. pages 1-4, IEEE, 2022. [doi]

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