Silicon nanowire temperature sensor and its characteristic

Chuan-Po Wang, Chien-Wei Liu, Chie Gau. Silicon nanowire temperature sensor and its characteristic. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 630-633, IEEE, 2011. [doi]

Authors

Chuan-Po Wang

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Chien-Wei Liu

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Chie Gau

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