Improved Lithographic Accuracy Using Image Registration Technology

Qiang Wang, Guohua Peng, Jing Yang 0001. Improved Lithographic Accuracy Using Image Registration Technology. In 4th International Symposium on Computational Intelligence and Design, ISCID 2011, Hangzhou, China, October 28-30, 2011, 2 Volumes. pages 19-22, IEEE, 2011. [doi]

Authors

Qiang Wang

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Guohua Peng

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Jing Yang 0001

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