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A high-dynamic range (HDR) back-side illuminated (BSI) CMOS image sensor for extreme UV detection

Xinyang Wang, Bram Wolfs, Jan Bogaerts, Guy Meynants, Ali BenMoussa. A high-dynamic range (HDR) back-side illuminated (BSI) CMOS image sensor for extreme UV detection. In Ralf Widenhorn, Valérie Nguyen, Antoine Dupret, editors, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII, Burlingame, California, USA, January 22-26, 2012. Volume 8298 of SPIE Proceedings, SPIE, 2012. [doi]

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