A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products

Xin Wang, Su Wu, Kaibo Wang. A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products. IEEE T. Automation Science and Engineering, 12(1):192-203, 2015. [doi]

Authors

Xin Wang

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Su Wu

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Kaibo Wang

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