Silicon nanowire resonators for aerosol nanoparticle mass sensing

H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, T. Salthammer, E. Peiner. Silicon nanowire resonators for aerosol nanoparticle mass sensing. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 506-509, IEEE, 2013. [doi]

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