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Application of Compound Control Method Based on WOA in Micropositioning Stage of SICM

Huiting Wen, Xiaolong Lu, Shiping Zhao, Xiaoyu Liu, Yang Yang, Song Leng. Application of Compound Control Method Based on WOA in Micropositioning Stage of SICM. Complexity, 2021, 2021. [doi]

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Huiting Wen

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Xiaolong Lu

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Shiping Zhao

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Xiaoyu Liu

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Yang Yang

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Song Leng

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