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On predictive supervisory control of automation structures for semiconductor fab using factory communications and SPNs

Heinz Westphal, Stephan Gramlich. On predictive supervisory control of automation structures for semiconductor fab using factory communications and SPNs. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, SMC 1998, Hyatt Regency La Jolla, San Diego, California, USA, October 11-14,1998. pages 669-673, IEEE, 1998. [doi]

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Heinz Westphal

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Stephan Gramlich

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