Product Ramp-up for Semiconductor Manufacturing Automated Recommendation of Control System Setup

Roland Willmann, Wolfgang Kastner. Product Ramp-up for Semiconductor Manufacturing Automated Recommendation of Control System Setup. In Stefan Biffl, Marta Sabou, editors, Semantic Web Technologies for Intelligent Engineering Applications. pages 219-255, Springer, 2016. [doi]

Authors

Roland Willmann

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Wolfgang Kastner

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