MEMS reliability

Ingrid De Wolf. MEMS reliability. Microelectronics Reliability, 43(7):1047-1048, 2003. [doi]

@article{Wolf03-2,
  title = {MEMS reliability},
  author = {Ingrid De Wolf},
  year = {2003},
  doi = {10.1016/S0026-2714(03)00117-3},
  url = {http://dx.doi.org/10.1016/S0026-2714(03)00117-3},
  tags = {reliability},
  researchr = {https://researchr.org/publication/Wolf03-2},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {43},
  number = {7},
  pages = {1047-1048},
}