Investigation of the surface silica layer on porous poly-Si thin films

Hei Wong, P. G. Han, M.-C. Poon, Y. Gao. Investigation of the surface silica layer on porous poly-Si thin films. Microelectronics Reliability, 41(2):179-184, 2001. [doi]

@article{WongHPG01,
  title = {Investigation of the surface silica layer on porous poly-Si thin films},
  author = {Hei Wong and P. G. Han and M.-C. Poon and Y. Gao},
  year = {2001},
  doi = {10.1016/S0026-2714(00)00098-6},
  url = {http://dx.doi.org/10.1016/S0026-2714(00)00098-6},
  tags = {C++},
  researchr = {https://researchr.org/publication/WongHPG01},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {41},
  number = {2},
  pages = {179-184},
}