Silicon oxynitride integrated waveguide for on-chip optical interconnects applications

C. K. Wong, Hei Wong, M. Chan, Y. T. Chow, H. P. Chan. Silicon oxynitride integrated waveguide for on-chip optical interconnects applications. Microelectronics Reliability, 48(2):212-218, 2008. [doi]

@article{WongWCCC08,
  title = {Silicon oxynitride integrated waveguide for on-chip optical interconnects applications},
  author = {C. K. Wong and Hei Wong and M. Chan and Y. T. Chow and H. P. Chan},
  year = {2008},
  doi = {10.1016/j.microrel.2007.04.014},
  url = {http://dx.doi.org/10.1016/j.microrel.2007.04.014},
  tags = {C++},
  researchr = {https://researchr.org/publication/WongWCCC08},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {48},
  number = {2},
  pages = {212-218},
}