Job scheduling of diffusion furnaces in semiconductor fabrication facilities

Kan Wu, Edward Huang, Mengchang Wang, Meimei Zheng. Job scheduling of diffusion furnaces in semiconductor fabrication facilities. European Journal of Operational Research, 301(1):141-152, 2022. [doi]

@article{WuHWZ22,
  title = {Job scheduling of diffusion furnaces in semiconductor fabrication facilities},
  author = {Kan Wu and Edward Huang and Mengchang Wang and Meimei Zheng},
  year = {2022},
  doi = {10.1016/j.ejor.2021.09.044},
  url = {https://doi.org/10.1016/j.ejor.2021.09.044},
  researchr = {https://researchr.org/publication/WuHWZ22},
  cites = {0},
  citedby = {0},
  journal = {European Journal of Operational Research},
  volume = {301},
  number = {1},
  pages = {141-152},
}