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Mirror Surface Finishing of Silicon Wafer Edge Using Ultrasonic Assisted Fixed-Abrasive CMP (UF-CMP)

Yongbo Wu, Weiping Yang, Masakazu Fujimoto, Libo Zhou. Mirror Surface Finishing of Silicon Wafer Edge Using Ultrasonic Assisted Fixed-Abrasive CMP (UF-CMP). IJAT, 7(6):663-670, 2013. [doi]

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Yongbo Wu

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Weiping Yang

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Masakazu Fujimoto

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Libo Zhou

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