A Fuzzy Neural Network Approach for Die Yield Prediction of Wafer Fabrication Line

Lihui Wu, Jie Zhang, Gong Zhang. A Fuzzy Neural Network Approach for Die Yield Prediction of Wafer Fabrication Line. In Yixin Chen, Hepu Deng, Degan Zhang, Yingyuan Xiao, editors, FSKD 2009, Sixth International Conference on Fuzzy Systems and Knowledge Discovery, Tianjin, China, 14-16 August 2009, 6 Volumes. pages 198-202, IEEE Computer Society, 2009. [doi]

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