Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Dunzhu Xia, Bing Zhang, Hao Wu, Tao Wu. Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator. Sensors, 20(24):7264, 2020. [doi]

@article{XiaZWW20,
  title = {Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator},
  author = {Dunzhu Xia and Bing Zhang and Hao Wu and Tao Wu},
  year = {2020},
  doi = {10.3390/s20247264},
  url = {https://doi.org/10.3390/s20247264},
  researchr = {https://researchr.org/publication/XiaZWW20},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {20},
  number = {24},
  pages = {7264},
}