A MEMS-Based Three-Ring Capacitive Angular Position Sensor With an Absolute Zero Position Feature

Jinxuan Xie, Tong Zhou, Xiaoshi Li, Yu Chen, Tianyu Yang, Yan Su. A MEMS-Based Three-Ring Capacitive Angular Position Sensor With an Absolute Zero Position Feature. IEEE Transactions on Industrial Electronics, 72(1):1054-1064, January 2025. [doi]

Authors

Jinxuan Xie

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Tong Zhou

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Xiaoshi Li

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Yu Chen

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Tianyu Yang

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Yan Su

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