Surface and interface characterization of oxygen plasma activated anodic bonding of glass-ceramics to stainless steel

Dehua Xiong, Hong Li, Jinshu Cheng. Surface and interface characterization of oxygen plasma activated anodic bonding of glass-ceramics to stainless steel. Microelectronics Reliability, 52(7):1367-1372, 2012. [doi]

Authors

Dehua Xiong

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Hong Li

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Jinshu Cheng

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