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Investigation of the effect of adsorption induced surface stress on the resonant frequency of PZT membrane based biosensors

Ting Xu, Jianmin Miao, Y. Liu, C. M. Li. Investigation of the effect of adsorption induced surface stress on the resonant frequency of PZT membrane based biosensors. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 565-568, IEEE, 2010. [doi]

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Ting Xu

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Jianmin Miao

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Y. Liu

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C. M. Li

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