Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration

Qiu Xu, Zhuo-qing Yang, Bo Fu, Yan-Ping Bao, Hao Wu, Yun-Na Sun, Mengyuan Zhao, Jian Li, Guifu Ding, Xiao-Lin Zhao. Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration. Sensors, 17(3):527, 2017. [doi]

Authors

Qiu Xu

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Zhuo-qing Yang

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Bo Fu

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Yan-Ping Bao

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Hao Wu

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Yun-Na Sun

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Mengyuan Zhao

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Jian Li

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Guifu Ding

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Xiao-Lin Zhao

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