Maskless Gray Scale Lithography and its 3D Microfluidic Applications

Yoko Yamanishi, Takuma Nakano, Yu Sawada, Kazuyoshi Itoga, Teruo Okano, Fumihito Arai. Maskless Gray Scale Lithography and its 3D Microfluidic Applications. JRM, 23(3):426-433, 2011. [doi]

Authors

Yoko Yamanishi

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Takuma Nakano

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Yu Sawada

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Kazuyoshi Itoga

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Teruo Okano

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Fumihito Arai

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