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Resonance Frequency and Vibration Mode Modification of Piezoelectric MEMS Ultrasonic Sensors on Buckled Diaphragm Structures for High Sensitivity and High Resolution Measurement

Kaoru Yamashita, Junpei Yamamoto, Zhengxin Yi. Resonance Frequency and Vibration Mode Modification of Piezoelectric MEMS Ultrasonic Sensors on Buckled Diaphragm Structures for High Sensitivity and High Resolution Measurement. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-3, IEEE, 2023. [doi]

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