High Performance Humidity Sensor by Using Silicon Nanowire Array

Xun Yang, Yuelin Wang, Tie Li. High Performance Humidity Sensor by Using Silicon Nanowire Array. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 603-606, IEEE, 2018. [doi]

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