A Microvision-Based Motion Measurement System for Nanopositioners Using the Feature-to-Phase Method

Sheng Yao, Xianmin Zhang, Benliang Zhu, Hai Li, Longhuan Yu, Sergej Fatikow. A Microvision-Based Motion Measurement System for Nanopositioners Using the Feature-to-Phase Method. IEEE T. Instrumentation and Measurement, 72:1-11, 2023. [doi]

Authors

Sheng Yao

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Xianmin Zhang

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Benliang Zhu

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Hai Li

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Longhuan Yu

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Sergej Fatikow

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