Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers

Yonggang Yin, Zhengxiang Fang, Yunfeng Liu, Fengtian Han. Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers. Sensors, 19(7):1544, 2019. [doi]

@article{YinFLH19,
  title = {Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers},
  author = {Yonggang Yin and Zhengxiang Fang and Yunfeng Liu and Fengtian Han},
  year = {2019},
  doi = {10.3390/s19071544},
  url = {https://doi.org/10.3390/s19071544},
  researchr = {https://researchr.org/publication/YinFLH19},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {19},
  number = {7},
  pages = {1544},
}