An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques

Haruo Yoda, Yozo Ohuchi, Yuzo Taniguchi, Masakazu Ejiri. An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques. IEEE Trans. Pattern Anal. Mach. Intell., 10(1):4-16, 1988. [doi]

Authors

Haruo Yoda

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Yozo Ohuchi

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Yuzo Taniguchi

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Masakazu Ejiri

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